Widodo, S., & Sudrajad, N. (2014). PROSES PHOTOLITHOGRAPHY DALAM FABRIKASI DIVAIS SEMIKONDUKTOR. PROSIDING SEMINAR NASIONAL FISIKA (E-JOURNAL), 3, 306 - 316. Retrieved from http://103.8.12.212:33180/unj/index.php/prosidingsnf/article/view/5539