Widodo, Slamet. “TEKNIK PELAPISAN SILIKON DIOKSIDA (SiO2) DENGAN ALAT RF-SPUTTERING ARC-12M”. PROSIDING SEMINAR NASIONAL FISIKA (E-JOURNAL) 1, no. 1 (October 30, 2012): 82 - 88. Accessed May 8, 2025. http://103.8.12.212:33180/unj/index.php/prosidingsnf/article/view/6158.