Widodo S. TEKNOLOGI PENDEPOSISIAN FILM TIPIS METAL DENGAN METODE DC-SPUTTERING. PROSIDING SNF [Internet]. 2012Oct.30 [cited 2025Jun.9];1(1):76 -81. Available from: http://103.8.12.212:33180/unj/index.php/prosidingsnf/article/view/6157